SFC5500 Series Multi-Gas Mass Flow Sensor

The SFC5500 mass flow controller series represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on the microthermal measurement principle and uses Sensirion’s proven CMOSens® MEMS technology. This allowed Sensirion to build a radical mass flow controller with excellent performance and reliability, which, unlike most other devices on the market, does not drift or require in-service re-calibration.

Thanks to the exceptionally high control range enabled by the CMOSens MEMS flow sensor, the SFC5500 series can cover multiple flow ranges of a traditional mass flow controller in a single device. Coupled with multi-gas calibration and exchangeable fittings, the SFC5500 series are the first mass flow controllers on the market available as standard off-the-shelf products suitable for a wide range of applications, making them the first mass flow controllers available via catalog distributors. The SFC5500 series complements the SFC5xxx family of Sensirion’s mass flow controllers.

The EK-F5x evaluation kit is a simple test set for the evaluation and qualification of Sensirion's SFC5500 mass flow controllers. Precise measurements for test purposes can be made quickly and inexpensively with this easy-to-use kit.

Evaluation Kit Contains

• RS485-to-USB adapter cable
• 100/240 V_AC adapter
• USB stick with PC software